US Patent 11987521 Substrate for a reflective optical element
Patent 11987521 was granted and assigned to Carl Zeiss SMT on May, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 29, 2020
0
Date of Patent
May 21, 2024
0
Patent Applicant
Patent Application Number
17136642
0
Patent Citations
Patent Inventor Names
Eric Eva
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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