US Patent 11987521 Substrate for a reflective optical element
Patent 11987521 was granted and assigned to Carl Zeiss SMT on May, 2024 by the United States Patent and Trademark Office.
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US Patent 11987521 Substrate for a reflective optical element
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Patent abstract
In order to reduce the degree of relaxation after an optical substrate has been compacted, in particular after a longer period, substrates (
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Patent Applicant
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Patent Number
Patent Inventor Names
Eric Eva0
Date of Patent
May 21, 2024
0Patent Application Number
171366420
Date Filed
December 29, 2020
0Patent Citations
Patent Primary Examiner
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