US Patent 9784987 Apodization for pupil imaging scatterometry
Patent 9784987 was granted and assigned to KLA-Tencor on October, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 14, 2015
0
Date of Patent
October 10, 2017
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Patent Applicant
Patent Application Number
14799132
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Patent Citations Received
Patent Inventor Names
Mark Ghinovker
0
Zeev Bomzon
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Amnon Manassen
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Andrew V. Hill
0
Barak Bringoltz
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Daniel Kandel
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Ohad Bachar
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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