Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xin Miao0
Juntao Li0
Kangguo Cheng0
Zhenxing Bi0
Date of Patent
October 24, 2017
Patent Application Number
15240056
Date Filed
August 18, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods of fabrication and semiconductor structures includes vertical transport field effect transistors (VTFETs) having a uniform bottom spacer layer between different pattern density regions. The bottom spacer layer can be deposited by plasma vapor deposition.
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