US Patent 9805985 Method of manufacturing semiconductor device and semiconductor device

A method of manufacturing a semiconductor device includes removing a first gate among a plurality of gates over a substrate. Removing the first gate exposes a first portion of an active area region under the first gate. The method further includes forming a first dielectric dummy gate over the exposed first portion of the active area region. The method further includes removing a second gate among the plurality of gates, wherein removing the second gate exposes a second portion of the active area region. The method further includes depositing a first gate electrode over the exposed second portion of the active area region.