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US Patent 9828237 MEMS device and MEMS vacuum microphone

Patent 9828237 was granted and assigned to Infineon Technologies on November, 2017 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Infineon Technologies
Infineon Technologies
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Date Filed
March 10, 2016
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Date of Patent
November 28, 2017
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Patent Applicant
Infineon Technologies
Infineon Technologies
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Patent Application Number
15066741
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Patent Citations Received
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US Patent 11889283 Triple-membrane MEMS device
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US Patent 12133060 Triple-membrane MEMS device
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US Patent 11932533 Signal processing circuit for triple-membrane MEMS device
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US Patent 11787688 Methods of forming MEMS diaphragms including corrugations
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US Patent 11929719 Super source follower
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US Patent 11780726 Dual-diaphragm assembly having center constraint
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US Patent 11772961 MEMS device with perimeter barometric relief pierce
Patent Inventor Names
Arnaud Walther
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Alfons Dehe
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Gerhard Metzger-Brueckl
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Johann Strasser
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
9828237
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Patent Primary Examiner
Edward Chin
Edward Chin
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