Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Samantha Tan0
Taeseung Kim0
Artur Kolics0
Jengyi Yu0
Keren Jacobs Kanarik0
Novy Tjokro0
Praveen Nalla0
Date of Patent
December 5, 2017
0Patent Application Number
152864210
Date Filed
October 5, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Atomic layer etching (ALE) enables effective filling of small feature structures on semiconductor and other substrates, such as contacts and vias, by bottom-up fill, for example electroless deposition (ELD) of cobalt.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
