US Patent 9841687 Synchronized integrated metrology for overlay-shift reduction
Is a
Date Filed
July 14, 2015
0
Date of Patent
December 12, 2017
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Patent Application Number
14798563
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Patent Citations Received
Patent Inventor Names
Jui-Chun Peng
0
Yung-Cheng Chen
0
Heng-Hsin Liu
0
Yung-Yao Lee
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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