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US Patent 9842757 Robot and adaptive placement system and method

Patent 9842757 was granted and assigned to Persimmon Technologies Corporation on December, 2017 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Patent Applicant
Persimmon Technologies Corporation
Persimmon Technologies Corporation
Current Assignee
Persimmon Technologies Corporation
Persimmon Technologies Corporation
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9842757
Patent Inventor Names
Christopher Hofmeister0
Martin Hosek0
Date of Patent
December 12, 2017
Patent Application Number
14295447
Date Filed
June 4, 2014
Patent Citations Received
‌
US Patent 11781238 Systems and methods for plate-up detection
‌
US Patent 12074042 High-density substrate processing systems and methods
0
‌
US Patent 11948817 Robot for simultaneous substrate transfer
0
‌
US Patent 11764093 Automatic wafer centering method and apparatus
Patent Primary Examiner
‌
Jason Holloway
Patent abstract

A method including moving a substrate, located on a first end effector of a robot, from a first location towards a second location by the robot; determining location of a fiducial on the substrate while the substrate is being moved from the first location towards the second location; comparing the determined location of the fiducial with a reference fiducial location while the robot is moving the substrate from the first location towards the second location.

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