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US Patent 11781238 Systems and methods for plate-up detection

Patent 11781238 was granted and assigned to Applied Materials on October, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Applied Materials
Applied Materials
Current Assignee
Applied Materials
Applied Materials
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11781238
Patent Inventor Names
David W. Bricker
Matthew Heller
Date of Patent
October 10, 2023
Patent Application Number
16859256
Date Filed
April 27, 2020
Patent Citations
‌
US Patent 7280233 Method and apparatus for inspecting an edge exposure area of a wafer
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US Patent 9842757 Robot and adaptive placement system and method
Patent Primary Examiner
‌
Tri T Ton
CPC Code
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C25D 21/12
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C25D 7/12
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C25D 17/005
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G01N 21/47
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G01N 21/8851
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G01N 21/94
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G01N 2021/945
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G01N 21/8806
...
Patent abstract

Systems for electroplating seal inspection may include a module configured to support a seal for inspection. The module may include a set of supports positioned to contact an interior rim of the seal. The module may be configured to rotate the seal about a central axis. The system may also include a detector positioned on the module. The detector may be positioned to scan an exterior surface of the seal.

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