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US Patent 11781238 Systems and methods for plate-up detection

Patent 11781238 was granted and assigned to Applied Materials on October, 2023 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant

Applied Materials

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

David W. Bricker

Matthew Heller

Date of Patent

October 10, 2023

Patent Application Number

16859256

Date Filed

April 27, 2020

Patent Citations

US Patent 7280233 Method and apparatus for inspecting an edge exposure area of a wafer

US Patent 9842757 Robot and adaptive placement system and method

Patent Primary Examiner

CPC Code

...

Patent abstract

Systems for electroplating seal inspection may include a module configured to support a seal for inspection. The module may include a set of supports positioned to contact an interior rim of the seal. The module may be configured to rotate the seal about a central axis. The system may also include a detector positioned on the module. The detector may be positioned to scan an exterior surface of the seal.

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