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US Patent 11781238 Systems and methods for plate-up detection

Patent 11781238 was granted and assigned to Applied Materials on October, 2023 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
Applied Materials
Applied Materials
Date Filed
April 27, 2020
Date of Patent
October 10, 2023
Patent Applicant
Applied Materials
Applied Materials
Patent Application Number
16859256
Patent Citations
‌
US Patent 7280233 Method and apparatus for inspecting an edge exposure area of a wafer
‌
US Patent 9842757 Robot and adaptive placement system and method
Patent Inventor Names
David W. Bricker
Matthew Heller
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11781238
Patent Primary Examiner
‌
Tri T Ton
CPC Code
‌
C25D 21/12
‌
C25D 7/12
‌
C25D 17/005
‌
G01N 21/47
‌
G01N 21/8851
‌
G01N 21/94
‌
G01N 2021/945
‌
G01N 21/8806
‌
H01L 21/6723
‌
H01L 22/12
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