US Patent 9865046 Defect inspection method and defect inspection device
Patent 9865046 was granted and assigned to Hitachi on January, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 11, 2013
0
Date of Patent
January 9, 2018
0
Patent Applicant
Patent Application Number
14758063
0
Patent Citations Received
Patent Inventor Names
Takahiro Urano
0
Toshifumi Honda
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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