Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Amnon Brosh0
Ryan Diestelhorst0
Steven Nasiri0
Date of Patent
February 27, 2018
0Patent Application Number
151110440
Date Filed
January 13, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Described herein is a miniaturized and ruggedized wafer level MEMS force sensor composed of a base and a cap. The sensor employs multiple flexible membranes, a mechanical overload stop, a retaining wall, and piezoresistive strain gauges.
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