Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kang Rae Ha0
Wonhaeng Lee0
Date of Patent
March 6, 2018
0Patent Application Number
149740230
Date Filed
December 18, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A fabrication method of a supporting unit supporting a substrate is provided. The fabrication method includes providing a supporting plate that is made of a non-conductive material and configured to support the substrate, providing a base plate that is disposed under the supporting plate and made of a material containing a conductive material, and forming a first metal film on a top surface of the base plate and bonding the supporting plate with the base plate through a brazing process.
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