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US Patent 9997413 Stacked vertical devices
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Date Filed
March 22, 2017
Date of Patent
June 12, 2018
Patent Application Number
15466168
Patent Citations Received
US Patent 11756957 Reducing gate resistance in stacked vertical transport field effect transistors
US Patent 11978796 Contact and isolation in monolithically stacked VTFET
0
US Patent 11908890 Isolation structure for stacked vertical transistors
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US Patent 12107085 Interconnect techniques for electrically connecting source/drain regions of stacked transistors
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US Patent 12029026 Method of manufacturing semiconductor structure and semiconductor structure
0
US Patent 11756961 Staggered stacked vertical crystalline semiconducting channels
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
9997413
Patent Primary Examiner
Michael Shingleton
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