US Patent D658693 Liner for plasma processing apparatus

Patent D658693 was granted and assigned to Tokyo Electron on May, 2012 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D658693

Patent Inventor Names

Jun Yamashita0

Masakazu Ban0

Atsushi Ueda0

Kouki Suzuki0

Date of Patent

May 1, 2012

Patent Application Number

29401106

Date Filed

September 7, 2011

Patent Citations Received

‌

US Patent D1028712 Neck finish of a bottle

Patent Primary Examiner

‌

Patricia Palasik

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