US Patent D658693 Liner for plasma processing apparatus
Patent D658693 was granted and assigned to Tokyo Electron on May, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 7, 2011
Date of Patent
May 1, 2012
Patent Application Number
29401106
Patent Citations Received
Patent Inventor Names
Jun Yamashita
0
Masakazu Ban
0
Atsushi Ueda
0
Kouki Suzuki
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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