US Patent D722298 Chamber of charged particle beam drawing apparatus

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D7222980

Patent Inventor Names

Hiroyasu Saito0

Seiichi Nakazawa0

Yoshinori Nakagawa0

Date of Patent

February 10, 2015

Patent Application Number

294794980

Date Filed

January 16, 2014

Patent Citations Received

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US Patent D1038901 Collimator for a physical vapor deposition chamber

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US Patent D998575 Collimator for use in a physical vapor deposition (PVD) chamber

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US Patent D1009816 Collimator for a physical vapor deposition chamber

Patent Primary Examiner

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Elizabeth J Oswecki

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