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US Patent D1009816 Collimator for a physical vapor deposition chamber

Patent D1009816 was granted and assigned to Applied Materials on January, 2024 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant

Applied Materials

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Current Assignee

Applied Materials

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Fuhong Zhang0

Xiangjin Xie0

Luke Vianney Varkey0

Keith A. Miller0

Martin Lee Riker0

Kishor Kumar Kalathiparambil0

Date of Patent

January 2, 2024

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Patent Application Number

298056810

Date Filed

August 29, 2021

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Patent Citations

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US Patent D741823 Vaporizer for substrate processing apparatus

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US Patent D746647 Strainer

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US Patent D752528 Waterproof electronics container

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Patent Citations Received

US Patent D1038901 Collimator for a physical vapor deposition chamber

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Patent Primary Examiner

Shawn T Gingrich

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CPC Code

0

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