US Patent D789888 Electrode plate for semiconductor manufacturing apparatus

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D7898880

Patent Inventor Names

Jeong Ho Lee0

Young Hoon Kim0

Hyun Soo Jang0

Jong Su Kim0

Date of Patent

June 20, 2017

Patent Application Number

295588250

Date Filed

March 22, 2016

Patent Citations Received

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US Patent D998112 Heater

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US Patent D1008986 Ion shield plate for plasma processing apparatus

Patent Primary Examiner

‌

Eric Goodman

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