US Patent D790041 Gas dispersing plate for semiconductor manufacturing apparatus

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D790041

Patent Inventor Names

Young Hoon Kim0

Hyun Soo Jang0

Jeong Ho Lee0

Young Hyo Jeon0

Date of Patent

June 20, 2017

Patent Application Number

29558824

Date Filed

March 22, 2016

Patent Citations Received

‌

US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus

‌

US Patent D1007449 Target profile for a physical vapor deposition chamber target

Patent Primary Examiner

‌

Eric Goodman

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