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US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

JinHo Shin0

JaeHyun Kim0

JeongHo Lee0

Date of Patent

November 28, 2023

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Patent Application Number

298392540

Date Filed

May 19, 2022

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Patent Citations

US Patent D787458 Gas supply plate for semiconductor manufacturing apparatus

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US Patent D790041 Gas dispersing plate for semiconductor manufacturing apparatus

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US Patent D796458 Gas flow control plate for semiconductor manufacturing apparatus

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US Patent 10604847 Gas distribution system, reactor including the system, and methods of using the same

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US Patent D880437 Gas supply plate for semiconductor manufacturing apparatus

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US Patent D911985 Gas introduction plate for plasma etching apparatus for etching semiconductor wafer

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US Patent 11015245 Gas-phase reactor and system having exhaust plenum and components thereof

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US Patent 11286562 Gas-phase chemical reactor and method of using same

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Patent Primary Examiner

Elizabeth J Oswecki

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CPC Code

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