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US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus

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Edits on 4 Dec, 2023
"Created via: Patent importer"
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created this topic on 4 Dec, 2023
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Infobox (+65 properties)
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 US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus

Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
D10059740
Patent Inventor Names
JaeHyun Kim0
JeongHo Lee0
JinHo Shin0
Date of Patent
November 28, 2023
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Patent Application Number
298392540
Date Filed
May 19, 2022
0
Patent Citations
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US Patent D654882 Gas-separating plate for reactor for manufacturing semiconductor
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US Patent D655260 Gas-separating plate for reactor for manufacturing semiconductor
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US Patent D655261 Gas-separating plate for reactor for manufacturing semiconductor
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US Patent D787458 Gas supply plate for semiconductor manufacturing apparatus
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US Patent D790041 Gas dispersing plate for semiconductor manufacturing apparatus
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US Patent D796458 Gas flow control plate for semiconductor manufacturing apparatus
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US Patent 10604847 Gas distribution system, reactor including the system, and methods of using the same
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US Patent D880437 Gas supply plate for semiconductor manufacturing apparatus
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US Patent D911985 Gas introduction plate for plasma etching apparatus for etching semiconductor wafer
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US Patent D913980 Gas supply plate for semiconductor manufacturing apparatus
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US Patent 11015245 Gas-phase reactor and system having exhaust plenum and components thereof
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US Patent 11286562 Gas-phase chemical reactor and method of using same
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US Patent D980813 Gas flow control plate for substrate processing apparatus
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US Patent D980814 Gas distributor for substrate processing apparatus
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Patent Primary Examiner
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Elizabeth J Oswecki
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CPC Code
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H01J 37/32
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H01J 37/32623
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H01J 37/32642
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H01J 37/32633
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H01J 37/3244
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H01J 37/32449
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C30B 25/16
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C30B 25/165
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C30B 25/14
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C23C 16/00
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C23C 16/44
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C23C 16/458
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C23C 16/455
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C23C 16/45587
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C23C 16/45563
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C23C 16/4558
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C23C 16/45574
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C23C 16/4557
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C23C 16/45568
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C23C 16/45565
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C23C 16/45559
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C23C 16/45519
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C23C 16/45521
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C23C 16/45517
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C23C 16/4412
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C23C 16/4401
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C23C 16/4408
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C23C 16/4404
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C23C 16/4402
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H01L 21/67
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H01L 21/68714
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F27B 15/00
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F27B 15/10
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F27B 15/006
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F27D 5/00
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F27D 5/0037
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H01L 21/67011
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H01L 21/67109
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H01L 21/67063
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H01L 21/6708
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H01L 21/67069
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