Golden has been acquired by ComplyAdvantage.Read about it here ⟶

‌

US Patent D840364 Electrode cover for a plasma processing apparatus

Patent D840364 was granted and assigned to Hitachi on February, 2019 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Applicant

Hitachi

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D8403640

Patent Inventor Names

Kazunori Nakamoto0

Kohei Sato0

Takamasa Ichino0

Date of Patent

February 12, 2019

Patent Application Number

296109960

Date Filed

July 18, 2017

Patent Citations Received

‌

US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication

‌

US Patent D1049067 Ring for an anti-rotation process kit for a substrate processing chamber

‌

US Patent 11996315 Thin substrate handling via edge clamping

‌

US Patent D1021832 Elastic membrane

‌

US Patent D1008986 Ion shield plate for plasma processing apparatus

Patent Primary Examiner

‌

Elizabeth J Oswecki

No article content yet.

Timeline

No Timeline data yet.

Further Resources

Title

Author

Link

Type

Date

No Further Resources data yet.

References

Find more entities like US Patent D840364 Electrode cover for a plasma processing apparatus

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.

Open Query Tool

Access by API