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US Patent D924824 Ion shield plate base for semiconductor manufacturing apparatus

Patent D924824 was granted and assigned to Hitachi on July, 2021 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Applicant

Hitachi

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D9248240

Patent Inventor Names

Kazuyuki Hirozane0

Michiaki Kobayashi0

Yoshifumi Ogawa0

Yutaka Kouzuma0

Date of Patent

July 13, 2021

Patent Application Number

296777280

Date Filed

January 23, 2019

Patent Citations

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US Patent 10692741 Radiation shield

Patent Citations Received

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US Patent D1008967 Collar for connector

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US Patent D1038874 Power supply unit

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US Patent D1008986 Ion shield plate for plasma processing apparatus

Patent Primary Examiner

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Elizabeth J Oswecki

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