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US Patent D956705 Cooling plate for a semiconductor processing apparatus

Patent D956705 was granted and assigned to Lam Research on July, 2022 by the United States Patent and Trademark Office.

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Patent

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Patent Applicant

Lam Research

Current Assignee

Lam Research

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D956705

Patent Inventor Names

Damien Slevin0

Bin Luo0

Allan Matthew Jones0

Date of Patent

July 5, 2022

Patent Application Number

29733653

Date Filed

May 5, 2020

Patent Citations

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US Patent 11230766 Substrate processing apparatus and method

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US Patent 10590535 Chemical treatment, deposition and/or infiltration apparatus and method for using the same

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