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US Patent D986826 Reaction tube

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
September 9, 2020
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Date of Patent
May 23, 2023
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Patent Application Number
29749808
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Patent Citations
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US Patent D629915 Transparent tube holder assembly with internal and external ribs
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US Patent D772824 Reaction tube
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US Patent D778458 Reaction tube
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US Patent D778457 Reaction tube
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US Patent D853979 Reaction tube
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US Patent D594488 Process tube for manufacturing semiconductor wafers
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US Patent D600659 Process tube for manufacturing semiconductor wafers
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Patent Citations Received
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US Patent D1019582 Inner tube of reaction tube for semiconductor manufacturing equipment
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US Patent D1019583 Inner tube of reaction tube for semiconductor manufacturing equipment
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US Patent D1019581 Inner tube of reaction tube for semiconductor manufacturing equipment
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D986826
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Patent Primary Examiner
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S. Bryan Reinholdt, Jr.
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CPC Code
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C23C 16/4581
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H01L 21/67248
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H01L 21/67109
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C23C 16/4412
0

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