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US Patent RE49784 Apparatus of plural charged-particle beams

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
August 27, 2020
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Date of Patent
January 2, 2024
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Patent Application Number
17005212
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Patent Citations
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US Patent 9607805 Apparatus of plural charged-particle beams
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US Patent 6943349 Multi beam charged particle device
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US Patent 7244949 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
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US Patent 9035249 Multi-beam system for high throughput EBI
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US Patent 9153413 Multi-beam scanning electron beam device and methods of using the same
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US Patent 9691588 Apparatus of plural charged-particle beams
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US Patent 9922799 Apparatus of plural charged-particle beams
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US Patent 10062541 Apparatus of plural charged-particle beams
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US Patent 10141160 Apparatus of plural charged-particle beams
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US Patent 10236156 Apparatus of plural charged-particle beams
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•••
Patent Inventor Names
Zhong-wei Chen
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Weiming Ren
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Xuerang Hu
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Xuedong Liu
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
RE49784
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Patent Primary Examiner
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James A Menefee
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CPC Code
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H01J 37/15
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H01J 37/21
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H01J 2237/024
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H01J 2237/0822
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H01J 2237/0825
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H01J 2237/15
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H01J 2237/1502
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H01J 2237/1508
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H01J 2237/1516
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H01J 2237/21
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