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US Patent RE49997 Metrological scanning probe microscope

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Deron Walters0

Jason Cleveland0

Roger Proksch0

Aleksander Labuda0

Date of Patent

June 4, 2024

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Patent Application Number

173656710

Date Filed

July 1, 2021

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Patent Citations

US Patent 8443459 Fast-scanning SPM scanner and method of operating same

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US Patent 9383386 Optical beam positioning unit for atomic force microscope

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US Patent 8458810 Scanning thermal twisting atomic force microscopy

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US Patent 10054612 Optical beam positioning unit for atomic force microscope

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US Patent 7497613 Probe with embedded heater for nanoscale analysis

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US Patent 8370960 Modular atomic force microscope

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Patent Primary Examiner

James A Menefee

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CPC Code

0

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Patent abstract

This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.

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