Phillip A Johnston

US Patent 11169177 Scanning probe and electron microscope probes and their manufacture

US Patent 11177114 Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement

US Patent 7842933 System and method for measuring overlay errors

US Patent 7847267 Scanning electron microscope having multiple detectors and a method for multiple detector based imaging

US Patent 7847272 Electron beam exposure mask, electron beam exposure method, and electron beam exposure system

US Patent 7868305 Technique for ion beam angle spread control

US Patent 7884335 Water treatment system

US Patent 7928361 Multiple detection systems

US Patent 7928364 Sampling system for containment and transfer of ions into a spectroscopy system

US Patent 7928365 Method and apparatus for mass spectrometry

US Patent 7928366 Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access

US Patent 7928367 Methods of preparing samples for MALDI mass spectrometry and reagent compositions for the same

US Patent 7928372 Mass spectrometer

US Patent 7928375 Microfabricated linear Paul-Straubel ion trap

US Patent 7928376 Element mapping unit, scanning transmission electron microscope, and element mapping method

US Patent 7928377 Charged particle beam apparatus and sample manufacturing method

US Patent 7928378 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

US Patent 7928379 Phase plate, imaging method, and electron microscope

US Patent 7928380 Sample holder, method for observation and inspection, and apparatus for observation and inspection

US Patent 7928381 Coaxial charged particle energy analyzer

US Patent 7928403 Multiple lens assembly and charged particle beam device comprising the same

US Patent 7928407 Lithographic apparatus and device manufacturing method

US Patent 7928409 Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions

US Patent 7928410 Optical beam pointing system for setting irradiation position for radiation

US Patent 7928413 Ion implanters

US Patent 7928414 Charged particle beam writing apparatus and charged particle beam writing method

US Patent 7928416 Laser produced plasma EUV light source

US Patent 7930766 Fluid delivery for scanning probe microscopy

US Patent 7932494 Method for characterizing vibrational performance of charged particle beam microscope system and application thereof

US Patent 7935922 Ion guide chamber

US Patent 7935926 Inspection equipment for fine pattern and morphology using microcolumn

US Patent 7935940 Measuring in-situ UV intensity in UV cure tool

US Patent 7935943 Focused ion beam processing system and method

US Patent 7943899 Method and apparatus for identifying the apex of a chromatographic peak

US Patent 7943900 Mass analysis using alternating fragmentation modes

US Patent 7947952 Nanomachining method and apparatus

US Patent 7952082 Sample preparation system

US Patent 7960695 Micromachined electron or ion-beam source and secondary pickup for scanning probe microscopy or object modification

US Patent 7960704 Compact pyroelectric sealed electron beam

US Patent 7964842 Evaluation of frequency mass spectra

US Patent 7968838 Apparatus and process for generating a neutron beam

US Patent 7968843 Method and apparatus for simultaneous SEM and optical examination

US Patent 7973275 Manipulation of objects in potential energy landscapes

US Patent 7973291 Electronic apparatus

US Patent 7973296 Electromagnetic systems with double-resonant spiral coil components

US Patent 7977628 System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes

US Patent 7977630 Electron microscope

US Patent 7977632 Scanning electron microscope

US Patent 7977656 Charged particle beam irradiation system and method of extracting charged particle beam

US Patent 7982185 Single and multiple operating mode ion sources with atmospheric pressure chemical ionization

US Patent 7982188 Apparatus and method for wafer pattern inspection

US Patent 7982199 Medical imaging apparatus

US Patent 7989776 Corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial, chromatic aberration

US Patent 7994487 Control of particles on semiconductor wafers when implanting boron hydrides

US Patent 7994488 Low contamination, low energy beamline architecture for high current ion implantation

US Patent 7999222 Time-of-flight mass spectrometer

US Patent 8003954 Gas delivery system for an ion source

US Patent 8003955 Sample manipulation device

US Patent 8003960 Reflective optical element, optical system and EUV lithography device

US Patent 8008617 Ion transfer device

US Patent 8008621 Apparatus of measuring the orientation relationship between neighboring grains using a goniometer in a transmission electron microscope and method for revealing the characteristics of grain boundaries

US Patent 8008633 Specimen stage-moving device for charged-particle beam system