Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Edward Sung0
Shawn M. Hamilton0
Colin F. Smith0
Date of Patent
July 17, 2018
0Patent Application Number
151635940
Date Filed
May 24, 2016
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Showerheads for semiconductor processing equipment are disclosed that include various features designed to minimize or eliminate non-uniform gas delivery across the surface of a wafer due to gas flow transients within the showerhead.
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