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US Patent 10023959 Anti-transient showerhead

Patent 10023959 was granted and assigned to Lam Research on July, 2018 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12116669 Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
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US Patent 11911780 Apparatus and method for coating substrates with washcoats
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Patent abstract

Showerheads for semiconductor processing equipment are disclosed that include various features designed to minimize or eliminate non-uniform gas delivery across the surface of a wafer due to gas flow transients within the showerhead.

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Patent Inventor Names
Colin F. Smith0
Edward Sung0
Shawn M. Hamilton0
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Patent Citations Received
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US Patent 11434568 Heated ceramic faceplate
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Infobox
Is a
Patent
Patent
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Patent Applicant
Lam Research
Lam Research
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Current Assignee
Lam Research
Lam Research
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
100239590
Date of Patent
July 17, 2018
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Patent Application Number
151635940
Date Filed
May 24, 2016
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Patent Citations Received
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US Patent 10221484 Temperature controlled showerhead
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US Patent 10316409 Radical source design for remote plasma atomic layer deposition
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US Patent 10378107 Low volume showerhead with faceplate holes for improved flow uniformity
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US Patent 10400333 Hybrid ceramic showerhead
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US Patent 10472716 Showerhead with air-gapped plenums and overhead isolation gas distributor
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US Patent 10494717 Anti-transient showerhead
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US Patent 10584415 Temperature controlled showerhead
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US Patent 10741365 Low volume showerhead with porous baffle
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US Patent 10745806 Showerhead with air-gapped plenums and overhead isolation gas distributor
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US Patent 11053587 Radical source design for remote plasma atomic layer deposition
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US Patent 11434568 Heated ceramic faceplate
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Patent Primary Examiner
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Jethro M. Pence
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Infobox
Patent Citations Received
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US Patent 10400333 Hybrid ceramic showerhead
0
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Infobox
Patent Citations Received
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US Patent 10494717 Anti-transient showerhead
0
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Infobox
Patent Citations Received
‌
US Patent 11434568 Heated ceramic faceplate
0
"update citations for inverse infoboxes"
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Infobox
Patent Citations Received
‌
US Patent 10494717 Anti-transient showerhead
0
Edits on 7 Sep, 2022
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edited on 7 Sep, 2022
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Infobox (+1 properties)
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Patent Citations Received
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US Patent 11434568 Heated ceramic faceplate

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