Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
December 3, 2019
Patent Application Number
16035491
Date Filed
July 13, 2018
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Showerheads for semiconductor processing equipment are disclosed that include various features designed to minimize or eliminate non-uniform gas delivery across the surface of a wafer due to gas flow transients within the showerhead.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
