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US Patent 10221484 Temperature controlled showerhead

Patent 10221484 was granted and assigned to Novellus Systems on March, 2019 by the United States Patent and Trademark Office.

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Patent attributes

Current Assignee

Novellus Systems

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Vince Wilson0

Easwar Srinivasan0

Henner W. Meinhold0

Stephen Yu-Hong Lau0

Dan M. Doble0

Date of Patent

March 5, 2019

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Patent Application Number

152750600

Date Filed

September 23, 2016

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Patent Citations

US Patent 10023959 Anti-transient showerhead

Patent Citations Received

US Patent 10494717 Anti-transient showerhead

US Patent 11332828 Gas distribution assembly mounting for fragile plates to prevent breakage

US Patent 10741365 Low volume showerhead with porous baffle

US Patent 10378107 Low volume showerhead with faceplate holes for improved flow uniformity

US Patent 10584415 Temperature controlled showerhead

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Patent Primary Examiner

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Patent abstract

A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.

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