Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vince Wilson0
Easwar Srinivasan0
Henner Meinhold0
Stephen Lau0
Dan M. Doble0
Date of Patent
March 10, 2020
Patent Application Number
16291822
Date Filed
March 4, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
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