US Patent 10221484 Temperature controlled showerhead
Patent 10221484 was granted and assigned to Novellus Systems on March, 2019 by the United States Patent and Trademark Office.
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Patent abstract
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
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Patent Inventor Names
Dan M. Doble0
Easwar Srinivasan0
Henner W. Meinhold0
Stephen Yu-Hong Lau0
Vince Wilson0
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Patent Number
102214840
Date of Patent
March 5, 2019
0Patent Application Number
152750600
Date Filed
September 23, 2016
0Patent Citations
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US Patent 10221484 Temperature controlled showerhead
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
10221484
Date of patent
March 5, 2019
Patent application number
15275060
Date Filed
September 23, 2016
Patent citations
Patent primary examiner
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