US Patent 10221484 Temperature controlled showerhead
Patent 10221484 was granted and assigned to Novellus Systems on March, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 23, 2016
0
Date of Patent
March 5, 2019
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Patent Application Number
15275060
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Patent Citations
Patent Citations Received
Patent Inventor Names
Vince Wilson
0
Easwar Srinivasan
0
Henner W. Meinhold
0
Stephen Yu-Hong Lau
0
Dan M. Doble
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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