Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Eric Shero0
Petri Raisanen0
Robert Brennan Milligan0
Suvi Haukka0
Michael Eugene Givens0
Date of Patent
October 2, 2018
0Patent Application Number
151352240
Date Filed
April 21, 2016
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A method for depositing a metal boride film onto a substrate is disclosed. In particular, the method comprises pulsing a metal halide precursor onto the substrate and pulsing a boron compound precursor onto the substrate. A reaction between the metal halide precursor and the boron compound precursor forms a metal boride film. Specifically, the method discloses forming a tantalum boride (TaB2) or a niobium boride (NbB2) film.
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