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US Patent 10103322 Method to remove sidewall damage after MTJ etching
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Patent
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Date Filed
March 22, 2017
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Date of Patent
October 16, 2018
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Patent Application Number
15465642
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Patent Citations Received
US Patent 11043251 Magnetic tunnel junction device and method of forming same
US Patent 11990167 Magnetic tunnel junction device and method of forming same
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Patent Inventor Names
Jesmin Haq
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Zhongjian Teng
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Tom Zhong
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10103322
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Patent Primary Examiner
Michael Trinh
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