Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mohamed Shihaam Suhail0
David G. Cohen0
Panya Wongsenakhum0
Ravi Bharatkumar Parmar0
Date of Patent
October 30, 2018
0Patent Application Number
148029200
Date Filed
July 17, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An azimuthal mixer component that may be plumbed in-line with a showerhead stem tube of a semiconductor processing apparatus is provided. The azimuthal mixer may include a main passage that is coaxial with the stem tube, and one or more plenums that partially or wholly encircle the main passage. Corresponding sets of radial passages may fluidically connect the main passage with each of the plenums.
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