US Patent 10113232 Azimuthal mixer
Patent 10113232 was granted and assigned to Lam Research on October, 2018 by the United States Patent and Trademark Office.
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Patent abstract
An azimuthal mixer component that may be plumbed in-line with a showerhead stem tube of a semiconductor processing apparatus is provided. The azimuthal mixer may include a main passage that is coaxial with the stem tube, and one or more plenums that partially or wholly encircle the main passage. Corresponding sets of radial passages may fluidically connect the main passage with each of the plenums.
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Patent Citations Received
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Patent Inventor Names
David G. Cohen0
Mohamed Shihaam Suhail0
Panya Wongsenakhum0
Ravi Bharatkumar Parmar0
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
101132320
Date of Patent
October 30, 2018
0Patent Application Number
148029200
Date Filed
July 17, 2015
0Patent Primary Examiner
Edits on 23 Jan, 2022
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US Patent 10113232 Azimuthal mixer
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10113232
Date of patent
October 30, 2018
Patent application number
14802920
Date Filed
July 17, 2015
Patent primary examiner
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