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US Patent 10147641 3D IC method and device
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Patent
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Date Filed
July 18, 2017
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Date of Patent
December 4, 2018
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Patent Application Number
15653329
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Patent Citations Received
US Patent 12136605 Layer structures for making direct metal-to-metal bonds at low temperatures in microelectronics and method for forming the same
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US Patent 11955445 Metal pads over TSV
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US Patent 11973056 Methods for low temperature bonding using nanoparticles
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US Patent 12027487 Structures for low temperature bonding using nanoparticles
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US Patent 12125784 Interconnect structures
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US Patent 12132020 Low temperature bonded structures
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US Patent 11515202 3D IC method and device
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US Patent 11515279 Low temperature bonded structures
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US Patent 11552041 Chemical mechanical polishing for hybrid bonding
US Patent 10840205 Chemical mechanical polishing for hybrid bonding
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Patent Inventor Names
Gaius Gillman Fountain, Jr.
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Paul M. Enquist
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Qin-Yi Tong
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10147641
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Patent Primary Examiner
David Vu
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