Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard M. Blank0
Date of Patent
December 18, 2018
0Patent Application Number
158153250
Date Filed
November 16, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Wafer handling robots are provided that are configured to provide high wafer placement accuracy. Such robots utilize rotational drive transfer mechanisms as well as rotational encoders that are located at each rotational joint, as opposed to solely at the motor outputs.
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