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US Patent 10155309 Wafer handling robots with rotational joint encoders

Patent 10155309 was granted and assigned to Lam Research on December, 2018 by the United States Patent and Trademark Office.

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US Patent 11937890 Direct drive for mechanical arm assembly
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US Patent 11852982 Semiconductor manufacturing system
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US Patent 11850745 Multi-turn drive assembly and systems and methods of use thereof
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US Patent 11850743 Transport apparatus, semiconductor manufacturing apparatus, and transport method
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US Patent 11850738 Robotic leg
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Patent abstract

Wafer handling robots are provided that are configured to provide high wafer placement accuracy. Such robots utilize rotational drive transfer mechanisms as well as rotational encoders that are located at each rotational joint, as opposed to solely at the motor outputs.

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US Patent 11776831 Substrate transport system and substrate transport method
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Patent Inventor Names
Richard M. Blank0
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
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Current Assignee
Lam Research
Lam Research
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
101553090
Date of Patent
December 18, 2018
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Patent Application Number
158153250
Date Filed
November 16, 2017
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Patent Citations Received
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US Patent 11020852 Substrate transport apparatus with independent accessory feedthrough
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US Patent 11413744 Multi-turn drive assembly and systems and methods of use thereof
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US Patent 11602856 Vacuum transfer device and substrate processing system
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Patent Primary Examiner
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Gerald McClain
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Patent Citations Received
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US Patent 11602856 Vacuum transfer device and substrate processing system
0
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Patent Citations Received
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US Patent 11413744 Multi-turn drive assembly and systems and methods of use thereof
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Patent citations received
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US Patent 11020852 Substrate transport apparatus with independent accessory feedthrough
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 US Patent 10155309 Wafer handling robots with rotational joint encoders

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10155309
Date of patent
December 18, 2018
Patent application number
15815325
Date Filed
November 16, 2017
Patent primary examiner
‌
Gerald McClain

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