Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Martin Hubert Peter Pfeiffer0
Tobias Kippenberg0
Arne Kordts0
Date of Patent
January 29, 2019
0Patent Application Number
151459680
Date Filed
May 4, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.
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