Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sven Uwe Rieschl0
Juergen Weichart0
Date of Patent
February 12, 2019
0Patent Application Number
154753310
Date Filed
March 31, 2017
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
So as to control the operation of a sputter target during the lifetime of the target and under HIPIMS operation, part of a magnet arrangement associated to the target is retracted from the target whereas a second part II of the magnet arrangement is, if at all, retracted less from the addressed backside during the lifetime of the target. Thereby, part I is closer to the periphery of target than part II, as both are eccentrically rotated about a rotational axis.
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