US Patent 10256142 Tungsten feature fill with nucleation inhibition
Is a
Date Filed
February 22, 2013
0
Date of Patent
April 9, 2019
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Patent Application Number
13774350
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Patent Citations Received
•••
Patent Inventor Names
Michal Danek
0
Raashina Humayun
0
Anand Chandrashekar
0
Deqi Wang
0
Esther Jeng
0
Juwen Gao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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