Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jasmine Lin0
Tsung-Han Yang0
Anand Chandrashekar0
Date of Patent
September 6, 2022
0Patent Application Number
164573530
Date Filed
June 28, 2019
0Patent Citations
...
Patent Citations Received
Patent Primary Examiner
Described herein are methods of filling features with tungsten, and related systems and apparatus, involving inhibition of tungsten nucleation. In some embodiments, the methods involve selective inhibition along a feature profile. Methods of selectively inhibiting tungsten nucleation can include exposing the feature to ammonia vapor in a non-plasma process. Process parameters including exposure time, substrate temperature, and chamber pressure can be used to tune the inhibition profile. Also provided are methods of filling multiple adjacent lines with reduced or no line bending. The methods involve selectively inhibiting the tungsten nucleation to reduce sidewall growth during feature fill.
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