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US Patent 10283600 Integrated circuit device
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Patent
Date Filed
January 15, 2018
Date of Patent
May 7, 2019
Patent Application Number
15871628
Patent Citations Received
US Patent 11637186 Field effect transistor having gate contact and source/drain contact separated by a gap
0
US Patent 11551969 Integrated circuit structure with backside interconnection structure having air gap
US Patent 11984350 Integrated circuit structure with backside interconnection structure having air gap
0
US Patent 11646346 Contact structure with air spacer for semiconductor device and method for forming the same
0
US Patent 10453934 Vertical transport FET devices having air gap top spacer
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10283600
Patent Primary Examiner
Hung K Vu
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