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US Patent 10325773 Conformal deposition of silicon carbide films

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
February 6, 2015
Date of Patent
June 18, 2019
Patent Application Number
14616435
Patent Citations Received
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US Patent 12027363 Methods of forming electronic devices comprising silicon carbide materials
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US Patent 11708634 Films of desired composition and film properties
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US Patent 11424118 Electronic devices comprising silicon carbide materials
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US Patent 11894227 Conformal deposition of silicon carbide films
0
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US Patent 10472714 Method to obtain SiC class of films of desired composition and film properties
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US Patent 10580690 Staircase encapsulation in 3D NAND fabrication
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US Patent 10832904 Remote plasma based deposition of oxygen doped silicon carbide films
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US Patent 10840087 Remote plasma based deposition of boron nitride, boron carbide, and boron carbonitride films
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US Patent 11049716 Gap fill using carbon-based films
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US Patent 11264234 Conformal deposition of silicon carbide films
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10325773
Patent Primary Examiner
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Brigitte A Paterson

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